CEE Spin Coater featuring stainless steel construction, compatible with up to 200mm wafers, maximum spin speed of 12,000 RPM, 7-inch full-color touchscreen with DataStream™ OS, unlimited recipe storage, integrated exhaust system, includes controller, monitor, cabling, and fittings.
Category: Semiconductor Spin Coater / Photoresist Processor
Make: Cost Effective Equipment (CEE)
Serial Number: CEE-09A
Substrate/Wafer Size Compatibility: Up to 200mm (8 inch) round or 6 inch x 6 inch square substrates
Spin Speed Control: Digital controller with spin speed resolution and repeatability < 0.2 rpm
Process Chamber Material: Stainless steel
Touchscreen / Interface Type: 7-inch full-color touchscreen with DataStream™ OS