CEE XPRO-II Spin Coater Workstation with touch screen controls, supports up to 8” wafers, 1 dispense arm, 208–240V power, vacuum and nitrogen supplies required, emergency stop, weight 750 lbs (340.2 kg), includes S/N 2211126.
Category: Spin Coater Workstation
Make: Cost Effective Equipment (CEE)
Model: XPRO-II Workstation
Serial Number: 2211126
Processing Chamber Size / Wafer Size Capacity: Up to 200 mm (8 inches)
Compatible Wafer Sizes: 75mm, 100mm, 150mm, 200mm (3", 4", 6", 8")
Spin Speed Range (min/max RPM): 100 – 10,000 RPM
Acceleration Range: 1 – 30,000 RPM/sec
Process Control Interface / Display: Touch screen programmable